Inventor
KALLINGAL CHIDAM
US6 patents
⚠️ This page may combine multiple inventors who share the name “KALLINGAL CHIDAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
4 patentsUS8612904B1Dec 17, 2013
Use of polarization and composite illumination source for advanced optical lithography
GLOBALFOUNDRIES INC5 citations65
US9443055B2Sep 13, 2016
Methods for retargeting circuit design layouts and for fabricating semiconductor devices using retargeted layouts
GLOBALFOUNDRIES INC1 citations49
US9064086B2Jun 23, 2015
Retargeting semiconductor device shapes for multiple patterning processes
GLOBALFOUNDRIES INC0 citations49
US8910094B2Dec 9, 2014
Retargeting semiconductor device shapes for multiple patterning processes
GLOBALFOUNDRIES INC1 citations49