Inventor
GO MASATO
JP4 patents
Patents
4 patentsUS4970546ANov 13, 1990
Exposure control device
NIKON CORP236 citations97
US6603533B2Aug 5, 2003
Irradiation control method and apparatus for pulsed light source used in exposure apparatus
NIKON CORP19 citations88
US6011612AJan 4, 2000
Processing apparatus using a laser light source
NIKON CORP12 citations70
US6731377B2May 4, 2004
Laser output control method, laser apparatus and exposure apparatus
NIKON CORP0 citations48