Inventor
GARZA CESAR M
US10 patents
⚠️ This page may combine multiple inventors who share the name “GARZA CESAR M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
6 patentsUS4891303AJan 2, 1990
Trilayer microlithographic process using a silicon-based resist as the middle layer
TEXAS INSTRUMENTS INC211 citations98
US4770739ASep 13, 1988
Bilayer photoresist process
TEXAS INSTRUMENTS INC80 citations94
US5094936AMar 10, 1992
High pressure photoresist silylation process and apparatus
TEXAS INSTRUMENTS INC30 citations92
US4882008ANov 21, 1989
Dry development of photoresist
TEXAS INSTRUMENTS INC48 citations92
US5716738AFeb 10, 1998
Dark rims for attenuated phase shift mask
TEXAS INSTRUMENTS INC5 citations61
US5085729AFeb 4, 1992
Uniformity using stagnant silylation
TEXAS INSTRUMENTS INC3 citations56
FREESCALE SEMICONDUCTOR INC
4 patentsUS6849515B1Feb 1, 2005
Semiconductor process for disposable sidewall spacers
FREESCALE SEMICONDUCTOR INC10 citations73
US6797440B2Sep 28, 2004
Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device
FREESCALE SEMICONDUCTOR INC3 citations61
US7901852B2Mar 8, 2011
Metrology of bilayer photoresist processes
FREESCALE SEMICONDUCTOR INC2 citations60
US7157377B2Jan 2, 2007
Method of making a semiconductor device using treated photoresist
FREESCALE SEMICONDUCTOR INC6 citations59