Inventor
LICATA THOMAS JOHN
US9 patents
Patents
9 patentsUS5796166AAug 18, 1998
Tasin oxygen diffusion barrier in multilayer structures
IBM122 citations98
US5776823AJul 7, 1998
Tasin oxygen diffusion barrier in multilayer structures
IBM67 citations96
US5885425AMar 23, 1999
Method for selective material deposition on one side of raised or recessed features
IBM88 citations93
US5726498AMar 10, 1998
Wire shape conferring reduced crosstalk and formation methods
IBM31 citations92
US5711858AJan 27, 1998
Process for depositing a conductive thin film upon an integrated circuit substrate
IBM20 citations90
US5766968AJun 16, 1998
Micro mask comprising agglomerated material
IBM17 citations84
US5874201AFeb 23, 1999
Dual damascene process having tapered vias
IBM17 citations81
US6110824AAug 29, 2000
Wire shape conferring reduced crosstalk and formation methods
IBM13 citations73
US5757879AMay 26, 1998
Tungsten absorber for x-ray mask
IBM9 citations72