Inventor
URA MASASHI
JP4 patents
Patents
4 patentsUS5963826AOct 5, 1999
Method of forming contact hole and multilayered lines structure
MITSUBISHI ELECTRIC CORP18 citations80
US6054392AApr 25, 2000
Active matrix substrate and method of forming a contact hole in the same
MITSUBISHI ELECTRIC CORP6 citations59
US6795039B2Sep 21, 2004
Antenna system and method for manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations50
US6535181B2Mar 18, 2003
Antenna system and method for manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations50