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Inventor
TAKANABE SHOICHI
JP
2 patents
Patents
2 patents
US5963826A
Oct 5, 1999
Method of forming contact hole and multilayered lines structure
MITSUBISHI ELECTRIC CORP
18 citations
80
US6054392A
Apr 25, 2000
Active matrix substrate and method of forming a contact hole in the same
MITSUBISHI ELECTRIC CORP
6 citations
59