P

Inventor

KOKUBUN TAKAO

JP7 patents
⚠️ This page may combine multiple inventors who share the name “KOKUBUN TAKAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

3 patents
US7697111B2Apr 13, 2010

Optical element and exposure apparatus

NIKON CORP48 citations96
US10175584B2Jan 8, 2019

Optical element and exposure apparatus

NIKON CORP1 citations71
US7812926B2Oct 12, 2010

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

NIKON CORP3 citations60

SHIRAI TAKESHI

3 patents
US8189170B2May 29, 2012

Optical element and exposure apparatus

SHIRAI TAKESHI15 citations90
US9046796B2Jun 2, 2015

Optical element and exposure apparatus

SHIRAI TAKESHI6 citations82
US8149381B2Apr 3, 2012

Optical element and exposure apparatus

SHIRAI TAKESHI12 citations82

KOKUBUN TAKAO

1 patent
US8724075B2May 13, 2014

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

KOKUBUN TAKAO0 citations43