Inventor
KUTSCH BERND
DE3 patents
Patents
3 patentsUS7285228B2Oct 23, 2007
Device and method for anisotropic plasma etching of a substrate, a silicon body in particular
BOSCH GMBH ROBERT14 citations81
US7288485B2Oct 30, 2007
Device and method for anisotropic plasma etching of a substrate, particularly a silicon element
BOSCH GMBH ROBERT4 citations60
US6874511B2Apr 5, 2005
Method of avoiding or eliminating deposits in the exhaust area of a vacuum system
BOSCH GMBH ROBERT4 citations60