P

Inventor

MURAKAMI ATSUNOBU

JP5 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI ATSUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIRAI TAKESHI

3 patents
US8189170B2May 29, 2012

Optical element and exposure apparatus

SHIRAI TAKESHI15 citations90
US9046796B2Jun 2, 2015

Optical element and exposure apparatus

SHIRAI TAKESHI6 citations82
US8149381B2Apr 3, 2012

Optical element and exposure apparatus

SHIRAI TAKESHI12 citations82

NIKON CORP

2 patents
US7697111B2Apr 13, 2010

Optical element and exposure apparatus

NIKON CORP48 citations96
US10175584B2Jan 8, 2019

Optical element and exposure apparatus

NIKON CORP1 citations71