P

Inventor

NIMMAKAYALA PAWAN KUMAR

US13 patents
⚠️ This page may combine multiple inventors who share the name “NIMMAKAYALA PAWAN KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOLECULAR IMPRINTS INC

6 patents
US7837907B2Nov 23, 2010

Alignment system and method for a substrate in a nano-imprint process

MOLECULAR IMPRINTS INC18 citations92
US7630067B2Dec 8, 2009

Interferometric analysis method for the manufacture of nano-scale devices

MOLECULAR IMPRINTS INC18 citations91
US7292326B2Nov 6, 2007

Interferometric analysis for the manufacture of nano-scale devices

MOLECULAR IMPRINTS INC47 citations91
US7880872B2Feb 1, 2011

Interferometric analysis method for the manufacture of nano-scale devices

MOLECULAR IMPRINTS INC8 citations82
US11161280B2Nov 2, 2021

Strain and kinetics control during separation phase of imprint process

MOLECULAR IMPRINTS INC1 citations62
US7785096B2Aug 31, 2010

Enhanced multi channel alignment

MOLECULAR IMPRINTS INC3 citations61

CHOI BYUNG-JIN

2 patents
US8432548B2Apr 30, 2013

Alignment for edge field nano-imprinting

CHOI BYUNG-JIN13 citations83
US8231821B2Jul 31, 2012

Substrate alignment

CHOI BYUNG-JIN2 citations62

NIMMAKAYALA PAWAN KUMAR

2 patents
US8147731B2Apr 3, 2012

Alignment system and method for a substrate in a nano-imprint process

NIMMAKAYALA PAWAN KUMAR6 citations81
US8334967B2Dec 18, 2012

Substrate support system having a plurality of contact lands

NIMMAKAYALA PAWAN KUMAR0 citations49

UNIV TEXAS

1 patent
US7245358B2Jul 17, 2007

Substrate support system

UNIV TEXAS24 citations92

KHUSNATDINOV NIYAZ

1 patent
US8652393B2Feb 18, 2014

Strain and kinetics control during separation phase of imprint process

KHUSNATDINOV NIYAZ17 citations91

REGENTS THE UNIVERSTIY OF TEXA

1 patent
US7259833B2Aug 21, 2007

Substrate support method

REGENTS THE UNIVERSTIY OF TEXA21 citations89