Inventor
AGHILI ALIREZA
US7 patents
⚠️ This page may combine multiple inventors who share the name “AGHILI ALIREZA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS11034057B2Jun 15, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US10895806B2Jan 19, 2021
Imprinting method and apparatus
CANON KK1 citations60
US12300522B2May 13, 2025
Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same
CANON KK0 citations59
US11951660B2Apr 9, 2024
Shaping system including an evaporation cover, shaping process, and method of manufacturing an article
CANON KK0 citations50
MOLECULAR IMPRINTS INC
3 patentsUS7630067B2Dec 8, 2009
Interferometric analysis method for the manufacture of nano-scale devices
MOLECULAR IMPRINTS INC18 citations91
US7292326B2Nov 6, 2007
Interferometric analysis for the manufacture of nano-scale devices
MOLECULAR IMPRINTS INC47 citations91
US7880872B2Feb 1, 2011
Interferometric analysis method for the manufacture of nano-scale devices
MOLECULAR IMPRINTS INC8 citations82