Inventor
MORIKAWA AKINARI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MORIKAWA AKINARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
5 patentsUS9362088B2Jun 7, 2016
Charged particle beam device and sample preparation method
HITACHI HIGH TECH CORP6 citations71
US6963069B2Nov 8, 2005
Charged particle beam device
HITACHI HIGH TECH CORP11 citations71
US11458513B2Oct 4, 2022
Charged particle beam apparatus and cleaning method
HITACHI HIGH TECH CORP0 citations59
US7459683B2Dec 2, 2008
Charged particle beam device with DF-STEM image valuation method
HITACHI HIGH TECH CORP3 citations57
US7964845B2Jun 21, 2011
Charged particle beam device
HITACHI HIGH TECH CORP0 citations49