Inventor
WU CHING-CHIA
TW3 patents
Patents
3 patentsUS12281385B2Apr 22, 2025
Gas dispenser and deposition apparatus using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9611546B2Apr 4, 2017
Solid precursor delivery system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9343315B2May 17, 2016
Method for fabricating semiconductor structure, and solid precursor delivery system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49