Inventor
TAKANO HARUYUKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAKANO HARUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OHMI TADAHIRO
4 patentsUS6585851B1Jul 1, 2003
Plasma etching device
OHMI TADAHIRO178 citations98
US8114245B2Feb 14, 2012
Plasma etching device
OHMI TADAHIRO157 citations97
US6357385B1Mar 19, 2002
Plasma device
OHMI TADAHIRO124 citations97
US6153068ANov 28, 2000
Parallel plate sputtering device with RF powered auxiliary electrodes and applied external magnetic field
OHMI TADAHIRO34 citations92