Inventor
RAJASEKHARAN BIJOY
NL5 patents
Patents
5 patentsUS11442367B2Sep 13, 2022
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV0 citations59
US11106141B2Aug 31, 2021
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV1 citations59
US11669017B2Jun 6, 2023
Method for controlling a manufacturing apparatus and associated apparatuses
ASML NETHERLANDS BV1 citations57
US12366809B2Jul 22, 2025
Methods and apparatus for controlling a lithographic process
ASML NETHERLANDS BV0 citations56
US11300887B2Apr 12, 2022
Method to change an etch parameter
ASML NETHERLANDS BV0 citations49