Inventor
WEI KAI-CHIN
TW5 patents
Patents
5 patentsUS11443966B2Sep 13, 2022
Semiconductor processing flow field control apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US12090503B2Sep 17, 2024
Semiconductor process chamber contamination prevention system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11779949B2Oct 10, 2023
Semiconductor process chamber contamination prevention system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11710620B2Jul 25, 2023
Semiconductor process chamber with heat pipe
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12191165B2Jan 7, 2025
Wafer transfer system and method of use
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45