Inventor
COONEY III EDWARD
US3 patents
Patents
3 patentsUS6958540B2Oct 25, 2005
Dual damascene interconnect structures having different materials for line and via conductors
IBM29 citations90
US7704876B2Apr 27, 2010
Dual damascene interconnect structures having different materials for line and via conductors
IBM1 citations60
US7300867B2Nov 27, 2007
Dual damascene interconnect structures having different materials for line and via conductors
IBM3 citations60