Inventor

THURNER MANFRED

AT3 patents

⚠️ This page may combine multiple inventors who share the name “THURNER MANFRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WACKER SILTRONIC HALBLEITERMAT

2 patents

US5980361ANov 9, 1999

Method and device for polishing semiconductor wafers

WACKER SILTRONIC HALBLEITERMAT54 citations92

US6095898AAug 1, 2000

Process and device for polishing semiconductor wafers

WACKER SILTRONIC HALBLEITERMAT51 citations89

SILTRONIC AG

1 patent

US6997776B2Feb 14, 2006

Process for producing a semiconductor wafer

SILTRONIC AG3 citations50