Inventor
JURCIK BENJAMIN J JR
US3 patents
Patents
3 patentsUS5963336AOct 5, 1999
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN108 citations97
US6154284ANov 28, 2000
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN61 citations94
US6493086B1Dec 10, 2002
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN34 citations91