Inventor
YOSHIMURA NOBUHIKO
JP2 patents
Patents
2 patentsUS6362013B1Mar 26, 2002
Semiconductor inspection apparatus and method of specifying attributes of dies on wafer in semiconductor inspection apparatus
AGILENT TECHNOLOGIES INC65 citations89
US7031783B2Apr 18, 2006
Virtualized generic equipment model data and control router for factory automation
AGILENT TECHNOLOGIES INC9 citations64