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Inventor
OURA HIDEKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “OURA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
1 patent
US6416618B2
Jul 9, 2002
Wafer processing apparatus
MITSUBISHI ELECTRIC CORP
16 citations
81
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
1 patent
US6661595B1
Dec 9, 2003
Cassette loading device having dustproof mechanism
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
1 citations
43