Inventor
CURRIE STEPHEN C
US2 patents
Patents
2 patentsUS6541168B2Apr 1, 2003
Vacuum ultraviolet transmitting direct deposit vitrified silicon oxyfluoride lithography glass photomask blanks
CORNING INC14 citations82
US6817211B2Nov 16, 2004
Vacuum ultraviolet transmitting direct deposit vitrified silicon oxyfluoride lithography glass photomask blanks
CORNING INC3 citations60