Inventor
SHINAGAWA YOUMEI
JP3 patents
Patents
3 patentsUS6608326B1Aug 19, 2003
Semiconductor film, liquid-crystal display using semiconductor film, and method of manufacture thereof
HITACHI LTD109 citations97
US6127210AOct 3, 2000
Manufacturing method of CMOS thin film semiconductor device and CMOS thin film semiconductor device manufactured thereby
HITACHI LTD25 citations91
US7419860B2Sep 2, 2008
Method of fabricating a semiconductor thin film
HITACHI LTD8 citations73