Inventor
KASAI TAKESHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “KASAI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS9708708B2Jul 18, 2017
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC465 citations98
US11293096B2Apr 5, 2022
Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer
HITACHI INT ELECTRIC INC8 citations85
US10163663B2Dec 25, 2018
Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC5 citations70
SUMITOMO METAL SMI ELECTRONICS
3 patentsUS6495394B1Dec 17, 2002
Chip package and method for manufacturing the same
SUMITOMO METAL SMI ELECTRONICS37 citations90
US6249053B1Jun 19, 2001
Chip package and method for manufacturing the same
SUMITOMO METAL SMI ELECTRONICS44 citations90
US6620650B2Sep 16, 2003
Chip package and method for manufacturing the same
SUMITOMO METAL SMI ELECTRONICS8 citations71
KOKUSAI ELECTRIC CORP
2 patentsUS10876207B2Dec 29, 2020
Substrate processing apparatus, liquid precursor replenishment system, and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP3 citations72
US11970771B2Apr 30, 2024
Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62