Inventor
TSAI HOW-CHENG
TW3 patents
Patents
3 patentsUS6706601B1Mar 16, 2004
Method of forming tiny silicon nitride spacer for flash EPROM by using dry+wet etching technology
TAIWAN SEMICONDUCTOR MFG10 citations69
US7055532B2Jun 6, 2006
Method to remove fluorine residue from bond pads
TAIWAN SEMICONDUCTOR MFG2 citations57
US6818555B2Nov 16, 2004
Method for metal etchback with self aligned etching mask
TAIWAN SEMICONDUCTOR MFG0 citations43