Inventor

MIZUNO SHIGERU

JP58 patents

⚠️ This page may combine multiple inventors who share the name “MIZUNO SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIZUNO SHIGERU

ANELVA CORP

Integrated module multi-chamber CVD processing system and its method for processing substrates

CVD apparatus

Heater for CVD apparatus

Integrated module multi-chamber CVD processing system and its method for processing subtrates

Integrated module multi-chamber CVD processing system and its method for processing substrates

CVD apparatus

Low pressure vapor phase growth apparatus

Chemical vapor deposition apparatus

Chemical vapor deposition apparatus

Plasma processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Method of processing a substrate and apparatus for the method

Thin film fabrication method and thin film fabrication apparatus

CVD apparatus

Thin film fabrication method and thin film fabrication apparatus

Electrode unit for in-situ cleaning in thermal CVD apparatus

Process for preventing deposition on inner surfaces of CVD reactor

Method of forming thin film

Method of depositing thin films by plasma-enhanced chemical vapor deposition

TOKYO ELECTRON LTD

Magnetron sputtering apparatus and film forming method

Method of forming a diffusion barrier and adhesion layer for an interconnect structure

Method for forming cobalt nitride cap layers

Diffusion barrier for integrated circuits formed from a layer of reactive metal and method of fabrication

Semiconductor device containing an aluminum tantalum carbonitride barrier film and method of forming

Method and system for improving sidewall coverage in a deposition system

Magnetron sputtering apparatus

Method for forming a ruthenium metal cap layer

Method for forming cobalt tungsten cap layers

SHINKO ELECTRIC IND CO

Semiconductor device and process of production of same

Multi-layered semiconductor device and method for producing the same

Method for manufacturing thin semiconductor chip

Wiring board and manufacturing method thereof and semiconductor device

Semiconductor apparatus having side surface wiring

Multilayer circuit board

BROTHER IND LTD

Press-molding process for preparing a powder compact

Print-head of a dot-printer

Piezoelectric ceramic composition and piezoelectric actuator for ink-jet head based on use of the same

Image recording apparatus provided with exposure unit using cathode ray tube

Hot melt ink jet apparatus having intervention member located between member and a printed printing sheet

CANON ANELVA CORP

Electrostatic chuck device

Electrostatic chuck device

Electrostatic chuck device

Electrostatic chuck device

ISHIZAKA TADAHIRO

Diffusion barrier and adhesion layer for an interconnect structure

Selective deposition of metal-containing cap layers for semiconductor devices

SAWADA KEN

Sheet processing apparatus and image forming system for forming a folding line on a sheet

Sheet processing apparatus and image forming system including multiple folding members

SETEK M KK

Method of fabricating semiconductor substrate having very shallow impurity diffusion layer

RICOH KK

Sheet medium adjustment apparatus and image formation system capable of sorting sheet media