Inventor

KANAMITSU SHINGO

JP20 patents

⚠️ This page may combine multiple inventors who share the name “KANAMITSU SHINGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KANAMITSU SHINGO

TOSHIBA KK

Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask

Photomask repair method and apparatus

Defect correction method for EUV mask

Method of correcting a photomask and method of manufacturing a semiconductor device

Mask, manufacturing method for mask, and manufacturing method for semiconductor device

Method for manufacturing mask for focus monitoring, and method for manufacturing semiconductor device

Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device

Mask, manufacturing method for mask, and manufacturing method for semiconductor device

Method of repairing defect and method of manufacturing semiconductor device

White defect repairing method and apparatus of photomask, manufacturing method of photomask, and manufacturing method of semiconductor device

Pattern evaluation method

TOSHIBA MEMORY CORP

Manufacturing method of replica template, manufacturing method of semiconductor device, and master template

Pattern formation method, control device, and semiconductor device manufacture method

Mask and manufacturing method of mask

KIOXIA CORP

Template manufacturing method and template base member

Template manufacturing method and template base member

Template, manufacturing method of template

FUKUHARA KAZUYA

Photomask and pattern forming method

KANAMITSU SHINGO

Template substrate, method for manufacturing same, and template

ITOH MASAMITSU

Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device