Inventor
WANG CHANGTAO
CN7 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHANGTAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INST OPTICS & ELECTRONICS CAS
6 patentsUS12174322B2Dec 24, 2024
F-P sensor probe, absolute distance measurement device, and absolute distance measurement method
INST OPTICS & ELECTRONICS CAS0 citations52
US12078937B1Sep 3, 2024
Near-field lithography immersion system, immersion unit and interface module thereof
INST OPTICS & ELECTRONICS CAS0 citations48
US11693320B2Jul 4, 2023
Secondary imaging optical lithography method and apparatus
INST OPTICS & ELECTRONICS CAS0 citations48
US12547081B2Feb 10, 2026
Illumination compensation method
INST OPTICS & ELECTRONICS CAS0 citations47
US12100188B2Sep 24, 2024
Template mark detection method and template position correction method based on single camera
INST OPTICS & ELECTRONICS CAS0 citations47
US12085846B2Sep 10, 2024
Method for inverse optical proximity correction of super-resolution lithography based on level set algorithm
INST OPTICS & ELECTRONICS CAS0 citations42