Inventor
HIRATA NATSUKI
JP8 patents
Patents
8 patentsUS12211729B2Jan 28, 2025
Member for semiconductor manufacturing apparatus
NGK INSULATORS LTD2 citations72
US10029328B2Jul 24, 2018
Metal wiring bonding structure and production method therefor
NGK INSULATORS LTD2 citations70
US12557183B2Feb 17, 2026
Ceramic heater and method of manufacturing the ceramic heater
NGK INSULATORS LTD0 citations60
US11515180B2Nov 29, 2022
Wafer-heating device
NGK INSULATORS LTD0 citations59
US12211726B2Jan 28, 2025
Member for semiconductor manufacturing apparatus
NGK INSULATORS LTD0 citations49
US10930539B2Feb 23, 2021
Electrostatic chuck heater
NGK INSULATORS LTD0 citations49
US10668558B2Jun 2, 2020
Metal wiring bonding structure and production method therefor
NGK INSULATORS LTD0 citations49
US10483146B2Nov 19, 2019
Electrostatic chuck heater
NGK INSULATORS LTD0 citations40