Inventor

FISCHER CHRISTIAN THOMAS

AT3 patents

Patents

3 patents

US11195730B2Dec 7, 2021

Method and apparatus for processing wafer-shaped articles

LAM RES AG2 citations68

US10490426B2Nov 26, 2019

Method and apparatus for processing wafer-shaped articles

LAM RES AG1 citations57

US9616451B2Apr 11, 2017

Apparatus for processing wafer-shaped articles

LAM RES AG0 citations29