Inventor
JOMEN MIHO
US6 patents
⚠️ This page may combine multiple inventors who share the name “JOMEN MIHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS7846841B2Dec 7, 2010
Method for forming cobalt nitride cap layers
TOKYO ELECTRON LTD9 citations83
US7799681B2Sep 21, 2010
Method for forming a ruthenium metal cap layer
TOKYO ELECTRON LTD4 citations62
US7718527B2May 18, 2010
Method for forming cobalt tungsten cap layers
TOKYO ELECTRON LTD2 citations62
US7776740B2Aug 17, 2010
Method for integrating selective low-temperature ruthenium deposition into copper metallization of a semiconductor device
TOKYO ELECTRON LTD4 citations58
US7884012B2Feb 8, 2011
Void-free copper filling of recessed features for semiconductor devices
TOKYO ELECTRON LTD1 citations48