Inventor
Yi Hanwei
CN2 patents
Patents
2 patentsUS12144177B2Nov 12, 2024
Methods for forming channel structures with protective structure in three-dimensional memory devices
YANGTZE MEMORY TECH CO LTD0 citations54
US11538825B2Dec 27, 2022
Methods for forming channel structures with reduced sidewall damage in three-dimensional memory devices
YANGTZE MEMORY TECH CO LTD0 citations54