Inventor

GAIDA PHILIPP

DE2 patents

⚠️ This page may combine multiple inventors who share the name “GAIDA PHILIPP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

1 patent

US12298675B2May 13, 2025

Projection exposure apparatus for semiconductor lithography with a vibration damper and method for designing a vibration damper

ZEISS CARL SMT GMBH0 citations55

ASML NETHERLANDS BV

1 patent

US12546379B2Feb 10, 2026

Positioning system, a lithographic apparatus, a driving force attenuation method, and a device manufacturing method

ASML NETHERLANDS BV0 citations52