Inventor
WOOD II OBERT REEVES
US11 patents
⚠️ This page may combine multiple inventors who share the name “WOOD II OBERT REEVES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
8 patentsUS7723704B2May 25, 2010
EUV pellicle with increased EUV light transmittance
GLOBALFOUNDRIES INC15 citations83
US7663127B2Feb 16, 2010
EUV debris mitigation filter and method for fabricating semiconductor dies using same
GLOBALFOUNDRIES INC9 citations83
US9436078B2Sep 6, 2016
Method for a low profile etchable EUV absorber layer with embedded particles in a photolithography mask
GLOBALFOUNDRIES INC4 citations72
US9435921B2Sep 6, 2016
Blazed grating spectral purity filter and methods of making such a filter
GLOBALFOUNDRIES INC2 citations62
US7986146B2Jul 26, 2011
Method and system for detecting existence of an undesirable particle during semiconductor fabrication
GLOBALFOUNDRIES INC4 citations62
US9298081B2Mar 29, 2016
Scattering enhanced thin absorber for EUV reticle and a method of making
GLOBALFOUNDRIES INC1 citations51
US9275449B2Mar 1, 2016
Methods and systems for determining a dose-to-clear of a photoresist
GLOBALFOUNDRIES INC0 citations41
US10468149B2Nov 5, 2019
Extreme ultraviolet mirrors and masks with improved reflectivity
GLOBALFOUNDRIES INC0 citations39