Inventor
VACASSY ROBERT
US9 patents
⚠️ This page may combine multiple inventors who share the name “VACASSY ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
6 patentsUS7582127B2Sep 1, 2009
Polishing composition for a tungsten-containing substrate
CABOT MICROELECTRONICS CORP21 citations92
US7247567B2Jul 24, 2007
Method of polishing a tungsten-containing substrate
CABOT MICROELECTRONICS CORP18 citations83
US6682575B2Jan 27, 2004
Methanol-containing silica-based CMP compositions
CABOT MICROELECTRONICS CORP6 citations72
US7294576B1Nov 13, 2007
Tunable selectivity slurries in CMP applications
CABOT MICROELECTRONICS CORP9 citations70
US7677956B2Mar 16, 2010
Compositions and methods for dielectric CMP
CABOT MICROELECTRONICS CORP2 citations57
US9463551B2Oct 11, 2016
Polishing pad with porous interface and solid core, and related apparatus and methods
CABOT MICROELECTRONICS CORP0 citations48