Inventor
UMEMOTO KOICHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “UMEMOTO KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
12 patentsUS5800618ASep 1, 1998
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD108 citations98
US5306895AApr 26, 1994
Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
NGK INSULATORS LTD157 citations98
US5280156AJan 18, 1994
Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means
NGK INSULATORS LTD406 citations98
US5616024AApr 1, 1997
Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles
NGK INSULATORS LTD99 citations96
US6101969AAug 15, 2000
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD48 citations95
US5683606ANov 4, 1997
Ceramic heaters and heating devices using such ceramic heaters
NGK INSULATORS LTD60 citations94
US6197246B1Mar 6, 2001
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD19 citations92
US5767027AJun 16, 1998
Aluminum nitride sintered body and its production method
NGK INSULATORS LTD24 citations92
US5573690ANov 12, 1996
Ceramic articles
NGK INSULATORS LTD36 citations92
US4933659AJun 12, 1990
Voltage non-linear resistor and method of producing the same
NGK INSULATORS LTD16 citations73
US5000876AMar 19, 1991
Voltage non-linear type resistors
NGK INSULATORS LTD4 citations62
US4940960AJul 10, 1990
Highly densified voltage non-linear resistor and method of manufacturing the same
NGK INSULATORS LTD0 citations52