Inventor

FURUSAWA SHIRO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “FURUSAWA SHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CO LTD

1 patent

US4805348AFeb 21, 1989

Flat lapping machine

SPEEDFAM CO LTD50 citations88

(unassigned)

1 patent

US6106375AAug 22, 2000

Apparatus for processing waste liquid and waste gas in polishing device

33 citations84