Inventor

PARKS STEVEN E

US5 patents

⚠️ This page may combine multiple inventors who share the name “PARKS STEVEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AEGIS LIGHTWAVE INC

2 patents

US7864423B2Jan 4, 2011

Spectrally adjustable filter

AEGIS LIGHTWAVE INC4 citations59

US7817272B2Oct 19, 2010

High-resolution spectrally adjustable filter

AEGIS LIGHTWAVE INC6 citations59

MATTSON TECH INC

1 patent

US6301434B1Oct 9, 2001

Apparatus and method for CVD and thermal processing of semiconductor substrates

MATTSON TECH INC133 citations96

PHOTURIS INC

1 patent

US6666588B1Dec 23, 2003

Collimator array having precisely aligned optical beams and method of assembling same

PHOTURIS INC3 citations53

KOEPPEN CHRISTOPHER S

1 patent

US8284489B2Oct 9, 2012

Spectrally adjustable filter

KOEPPEN CHRISTOPHER S1 citations43