Inventor

SHIEH BRIAN SY YUAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “SHIEH BRIAN SY YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6949203B2Sep 27, 2005

System level in-situ integrated dielectric etch process particularly useful for copper dual damascene

APPLIED MATERIALS INC69 citations97

US6500357B1Dec 31, 2002

System level in-situ integrated dielectric etch process particularly useful for copper dual damascene

APPLIED MATERIALS INC38 citations92

TSUEI LUN

1 patent

US9714465B2Jul 25, 2017

Gas distribution blocker apparatus

TSUEI LUN30 citations89

(unassigned)

1 patent

US6793835B2Sep 21, 2004

System level in-situ integrated dielectric etch process particularly useful for copper dual damascene

5 citations61