Inventor
KO BU-JIN
KR6 patents
Patents
6 patentsUS6770836B2Aug 3, 2004
Impedance matching circuit for inductively coupled plasma source
JUSUNG ENG CO LTD25 citations89
US6847516B2Jan 25, 2005
Electrostatic chuck for preventing an arc
JUSUNG ENG CO LTD16 citations81
US7846292B2Dec 7, 2010
Gas injector and apparatus including the same
JUSUNG ENG CO LTD13 citations79
US7156950B2Jan 2, 2007
Gas diffusion plate for use in ICP etcher
JUSUNG ENG CO LTD9 citations71
US6917508B2Jul 12, 2005
Apparatus for manufacturing semiconductor device
JUSUNG ENG CO LTD11 citations71
US6653988B2Nov 25, 2003
Parallel resonance whirl antenna
JUSUNG ENG CO LTD5 citations60