Inventor

MARX DAVID S

US8 patents

⚠️ This page may combine multiple inventors who share the name “MARX DAVID S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAMAR TECHNOLOGY INC

2 patents

US7477401B2Jan 13, 2009

Trench measurement system employing a chromatic confocal height sensor and a microscope

TAMAR TECHNOLOGY INC57 citations95

US7738113B1Jun 15, 2010

Wafer measurement system and apparatus

TAMAR TECHNOLOGY INC29 citations84

MARX DAVID S

2 patents

US9714825B2Jul 25, 2017

Wafer shape thickness and trench measurement

MARX DAVID S5 citations69

US8649016B2Feb 11, 2014

System for directly measuring the depth of a high aspect ratio etched feature on a wafer

MARX DAVID S2 citations59

RUDOLPH TECH INC

2 patents

US9587932B2Mar 7, 2017

System for directly measuring the depth of a high aspect ratio etched feature on a wafer

RUDOLPH TECH INC0 citations51

US9952041B2Apr 24, 2018

Assessing alignment of top and bottom ends of TSVs and characterizing microfabrication process

RUDOLPH TECH INC0 citations46

(unassigned)

1 patent

US6710864B1Mar 23, 2004

Concentricity measuring instrument for a fiberoptic cable end

CORNING INC

1 patent

US6782146B2Aug 24, 2004

Multiple polarization combiner-splitter-isolator and method of manufacturing the same

CORNING INC10 citations70