P

Inventor

GUNJI ISAO

JP8 patents
⚠️ This page may combine multiple inventors who share the name “GUNJI ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US7582544B2Sep 1, 2009

ALD film forming method

TOKYO ELECTRON LTD7 citations72
US8029856B2Oct 4, 2011

Film formation method and apparatus

TOKYO ELECTRON LTD4 citations61
US12205799B2Jan 21, 2025

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations50
US11842886B2Dec 12, 2023

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations50

GUNJI ISAO

3 patents
US8551565B2Oct 8, 2013

Film forming method and film forming apparatus

GUNJI ISAO0 citations48
US8562751B2Oct 22, 2013

Dry cleaning method of substrate processing apparatus

GUNJI ISAO0 citations46
US8419856B2Apr 16, 2013

Substrate processing apparatus

GUNJI ISAO1 citations45

TADA KUNIHIRO

1 patent
US8124168B2Feb 28, 2012

Substrate processing method and substrate processing apparatus

TADA KUNIHIRO2 citations55