Inventor

YOKOZAWA KOJIRO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “YOKOZAWA KOJIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SASAJIMA RYOTA

2 patents

US8252701B2Aug 28, 2012

Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus

SASAJIMA RYOTA16 citations90

US9039838B2May 26, 2015

Method of manufacturing semiconductor device and substrate processing apparatus

SASAJIMA RYOTA2 citations60

HITACHI INT ELECTRIC INC

2 patents

US9966252B2May 8, 2018

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC2 citations72

US9966251B2May 8, 2018

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC2 citations72

SHIMADA TOMOHARU

1 patent

US8963051B2Feb 24, 2015

Heat treatment apparatus and method of manufacturing substrates

SHIMADA TOMOHARU0 citations42