Inventor

KAMADA TOMIKO

JP3 patents

Patents

3 patents

US9305795B2Apr 5, 2016

Plasma processing method

TOKYO ELECTRON LTD3 citations68

US9412607B2Aug 9, 2016

Plasma etching method

TOKYO ELECTRON LTD1 citations50

US9373520B2Jun 21, 2016

Multilayer film etching method and plasma processing apparatus

TOKYO ELECTRON LTD1 citations49