P

Inventor

EISERT FRANK

DE6 patents
⚠️ This page may combine multiple inventors who share the name “EISERT FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

3 patents
US7118449B1Oct 10, 2006

Method of manufacturing an optical element

ZEISS CARL SMT AG33 citations91
US7481543B1Jan 27, 2009

Mirror for use in a projection exposure apparatus

ZEISS CARL SMT AG8 citations82
US7557902B2Jul 7, 2009

Projection objective

ZEISS CARL SMT AG10 citations81

SCHOEPPACH ARMIN

1 patent
US9436101B2Sep 6, 2016

Optical arrangement and microlithographic projection exposure apparatus including same

SCHOEPPACH ARMIN2 citations60

SCHOTT AG

1 patent
US7031428B2Apr 18, 2006

Substrate material for X-ray optical components

SCHOTT AG6 citations58

ZEISS CARL SMT GMBH

1 patent
US12235097B2Feb 25, 2025

Diffractive optical element for a test interferometer

ZEISS CARL SMT GMBH0 citations46