Inventor
SHERMAN STEVEN ROBERT
US3 patents
Patents
3 patentsUS10332748B2Jun 25, 2019
Etch rate modulation through ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations69
US9934982B2Apr 3, 2018
Etch rate modulation through ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations69
US9613813B2Apr 4, 2017
Method for improving critical dimension variability by implanting argon or silicon ions into a patterned mask
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations68