Inventor
NORASETTHEKUL SOMCHINTANA
US6 patents
⚠️ This page may combine multiple inventors who share the name “NORASETTHEKUL SOMCHINTANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10332748B2Jun 25, 2019
Etch rate modulation through ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations69
US9934982B2Apr 3, 2018
Etch rate modulation through ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations69
US10515802B2Dec 24, 2019
Techniques for forming low stress mask using implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations52