Inventor

ZHENG HUIFENG

US2 patents

⚠️ This page may combine multiple inventors who share the name “ZHENG HUIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US12249514B2Mar 11, 2025

Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers

LAM RES CORP0 citations57

WISCONSIN ALUMNI RES FOUND

1 patent

US10090150B2Oct 2, 2018

Low dielectric constant (low-k) dielectric and method of forming the same

WISCONSIN ALUMNI RES FOUND0 citations43