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Inventor

NOVAK RICHARD E

US13 patents
⚠️ This page may combine multiple inventors who share the name “NOVAK RICHARD E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUBMICRON SYSTEMS INC

5 patents
US5247954ASep 28, 1993

Megasonic cleaning system

SUBMICRON SYSTEMS INC95 citations95
US5234540AAug 10, 1993

Process for etching oxide films in a sealed photochemical reactor

SUBMICRON SYSTEMS INC105 citations95
US5228206AJul 20, 1993

Cluster tool dry cleaning system

SUBMICRON SYSTEMS INC112 citations95
US5437710AAug 1, 1995

Chemical processing system for maintaining concentration of semiconductor processing solution

SUBMICRON SYSTEMS INC9 citations73
US5454677AOct 3, 1995

High temperature ceramic nut

SUBMICRON SYSTEMS INC6 citations72

RCA CORP

3 patents
US4271129AJun 2, 1981

Heat radiation deflectors within an EFG crucible

RCA CORP24 citations80
US4222502ASep 16, 1980

Meter and dispensing system for abrasive materials

RCA CORP14 citations71
US4251206AFeb 17, 1981

Apparatus for and method of supporting a crucible for EFG growth of sapphire

RCA CORP6 citations61

FSI INT INC

2 patents
US4900395AFeb 13, 1990

HF gas etching of wafers in an acid processor

FSI INT INC332 citations97
US5458724AOct 17, 1995

Etch chamber with gas dispersing membrane

FSI INT INC37 citations88

GRANT ROBERT W

1 patent
US5332271AJul 26, 1994

High temperature ceramic nut

GRANT ROBERT W46 citations93

AKRION LLC

1 patent
US6837944B2Jan 4, 2005

Cleaning and drying method and apparatus

AKRION LLC24 citations89

PALL CORP

1 patent
US9656197B2May 23, 2017

Systems and methods for conditioning a filter assembly

PALL CORP0 citations23