Inventor
Wei jia-lin
TW8 patents
Patents
8 patentsUS11705332B2Jul 18, 2023
Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations85
US12057315B2Aug 6, 2024
Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11822237B2Nov 21, 2023
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12463034B2Nov 4, 2025
Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12135501B2Nov 5, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12272554B2Apr 8, 2025
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12271113B2Apr 8, 2025
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11784046B2Oct 10, 2023
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52